Oct 22, 2020  
BC3 Academic Catalog: 2020-2021 
    
BC3 Academic Catalog: 2020-2021

ELEC 273 - Basic Nanotechnology Processes


3 credits (2 lecture, 2 lab)
This course is the hands-on introduction to the processing involved in “top down”, “bottom up”, and hybrid nanofabrication. The majority of the course details a step-by-step description of the equipment, facilities processes and process flow needed to fabricate devices and structures. Students learn to appreciate processing and manufacturing concerns including process control, contamination, yield, and processing interaction. The students design process flows for micro- and nano-scale systems. Students learn the similarities and differences in “top down” and “bottom up” equipment and process flows by undertaking hands-on processing. This hands-on exposure covers basic nanofabrication processes including colloidal chemistry, self assembly, catalyzed nanoparticle growth, lithography, wet and dry etching, physical vapor deposition, and chemical vapor deposition.  Summer semester only.
Corerequisite(s): ELEC 272.
Prerequisite(s): ELEC 222, ELEC 240, METR 115, CHEM 101.