ELEC 273 - Basic Nanotechnology Processes

3 Credits: (2 lecture, 2 lab)

Course Description
This course is the hands-on introduction to the processing involved in “top down”, “bottom up”, and hybrid nanofabrication. The majority of the course details a step-by-step description of the equipment, facilities processes and process flow needed to fabricate devices and structures. Students learn to appreciate processing and manufacturing concerns including process control, contamination, yield, and processing interaction. The students design process flows for micro- and nano-scale systems. Students learn the similarities and differences in “top down” and “bottom up” equipment and process flows by undertaking hands-on processing. This hands-on exposure covers basic nanofabrication processes including colloidal chemistry, self assembly, catalyzed nanoparticle growth, lithography, wet and dry etching, physical vapor deposition, and chemical vapor deposition.

Note Summer semester only.

Prerequisite ELEC 222, ELEC 240, METR 115, CHEM 101. Corequisite ELEC 272.