ELEC 283 - Materials Modification in Nanotechnology

3 Credits: (2 lecture, 2 lab)

Course Description
This course will cover in detail the processing techniques and specialty hardware used in modifying properties in nanofabrication. Material modification steps to be covered will include etching, functionalization, alloying, stress control and doping. Avoiding unintentional materials modification will also be covered including such topics as use of diffusion barriers, encapsulation, electromigration control, corrosion control, wettability, stress control, and adhesion. Hands-on materials modification and subsequent characterization will be undertaken.

Note Summer semester only.

Prerequisite ELEC 274, ELEC 282. Corequisite ELEC 284.